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1

Inductively coupled plasma etching of tapered via in silicon for MEMS integration

Ren, Zhong, McNie, Mark E.

Journal:

Microelectronic Engineering

Year:

2015

Language:

english

File:

PDF, 2.18 MB

english, 2015

2

Adaptive coded-aperture imaging with subpixel superresolution

Slinger, Chris, Bennett, Helen, Dyer, Gavin, Gordon, Neil, Huckridge, David, McNie, Mark, Penney, Richard, Proudler, Ian, Rice, Kevin, Ridley, Kevin, Russell, Lee, de Villiers, Geoffrey, Watson, Phili

Journal:

Year:

2012

Language:

english

File:

PDF, 388 KB

english, 2012

3

SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Characterization and optimization of deep dry etching for MEMS applications

Rickard, Alexandra L., McNie, Mark E., Behringer, Uwe F. W., Uttamchandani, Deepak G.

Year:

2001

Language:

english

File:

PDF, 490 KB

english, 2001

4

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Adaptive Coded Aperture Imaging and Non-Imaging Sensors - An investigation of the potential for the use of a high resolution adaptive coded aperture system in the mid-wave infrared

Slinger, Chris, Eismann, Michael, Gordon, Neil, Lewis, Keith, McDonald, Gregor, McNie, Mark, Payne, Doug, Ridley, Kevin, Strens, Malcolm, De Villiers, Geoff, Wilson, Rebecca, Casasent, David P., Clark

Year:

2007

Language:

english

File:

PDF, 930 KB

english, 2007

5

SPIE Proceedings [SPIE SPIE Europe Security + Defence - Berlin, Germany (Monday 31 August 2009)] Unmanned/Unattended Sensors and Sensor Networks VI - Retro-reflective communications over a kilometre range using a MEMS-based optical tag

Scott, Andrew M., Ridley, Kevin D., Jones, David C., McNie, Mark E., Smith, Gilbert W., Brunson, Kevin M., Lewin, Andrew, Lewis, Keith L., Carapezza, Edward M.

Year:

2009

Language:

english

File:

PDF, 3.07 MB

english, 2009

6

SPIE Proceedings [SPIE European Symposium on Optics and Photonics for Defence and Security - London, United Kingdom (Monday 25 October 2004)] Integrated Optical Devices, Nanostructures, and Displays - Integrated micromachined filters for wavelength division multiplexing

Lewis, Keith L., Smith, Gilbert W., McNie, Mark E., Lewis, Keith L.

Year:

2004

Language:

english

File:

PDF, 589 KB

english, 2004

7

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California (Sunday 1 August 2010)] Adaptive Coded Aperture Imaging, Non-Imaging, and Unconventional Imaging Sensor Systems II - Tracking point targets at sub-pixel accuracy in adaptive coded aperture imagery without decoding

Gilholm, Kevin, Slinger, Christopher W., Gordon, Neil T., Ridley, Kevin, Bennett, Helen, McNie, Mark, Rogers, Stanley, Casasent, David P., Dolne, Jean J., Karr, Thomas J., Gamiz, Victor L.

Year:

2010

Language:

english

File:

PDF, 308 KB

english, 2010

8

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 10 August 2008)] Adaptive Coded Aperture Imaging and Non-Imaging Sensors II - Adaptive coded aperture imaging in the infrared: towards a practical implementation

Slinger, Chris W., Casasent, David P., Rogers, Stanley, Gilholm, Kevin, Gordon, Neil, McNie, Mark, Payne, Doug, Ridley, Kevin, Strens, Malcolm, Todd, Mike, De Villiers, Geoff, Watson, Philip, Wilson,

Year:

2008

Language:

english

File:

PDF, 883 KB

english, 2008

9

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 10 August 2008)] Adaptive Coded Aperture Imaging and Non-Imaging Sensors II - A large area reconfigurable MOEMS microshutter array for coded aperture imaging systems

McNie, Mark E., Casasent, David P., Rogers, Stanley, King, David O., Price, Nicola, Combes, David J., Smith, Gilbert W., Brown, Alan G., Gordon, Neil T., Stone, Steven M., Brunson, Kevin M., Lewis, Ke

Year:

2008

Language:

english

File:

PDF, 2.42 MB

english, 2008

10

Control of Stress in a Metal–Nitride–Metal Sandwich for CMOS-Compatible Surface Micromachining

Davies, Rhodri R., Combes, David J., McNie, Mark E., Brunson, Kevin M

Journal:

MRS Proceedings

Year:

2003

Language:

english

File:

PDF, 291 KB

english, 2003

11

SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] MOEMS and Miniaturized Systems VIII - Large area transmissive modulator for a remotely interrogated MEMS-based optical tag

McNie, Mark E., Dickensheets, David L., Schenk, Harald, Scott, Andrew M., Price, Nicola, Piyawattanametha, Wibool, Combes, David J., Smith, Gilbert W., Ridley, Kevin D., Brunson, Kevin M., Jones, Davi

Year:

2009

Language:

english

File:

PDF, 1.11 MB

english, 2009

12

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Adaptive Coded Aperture Imaging and Non-Imaging Sensors - Reconfigurable mask for adaptive coded aperture imaging (ACAI) based on an addressable MOEMS microshutter array

McNie, Mark E., Casasent, David P., Clark, Timothy, Combes, David J., Smith, Gilbert W., Price, Nicola, Ridley, Kevin D., Brunson, Kevin M., Lewis, Keith L., Slinger, Chris W., Rogers, Stanley

Year:

2007

Language:

english

File:

PDF, 401 KB

english, 2007

13

SPIE Proceedings [SPIE Optics/Photonics in Security and Defence - Florence, Italy (Monday 17 September 2007)] Electro-Optical and Infrared Systems: Technology and Applications IV - Coded aperture systems as non-conventional lensless imagers for the visible and infrared

Slinger, Chris, Huckridge, David A., Ebert, Reinhard R., Gordon, Neil, Lewis, Keith, McDonald, Gregor, McNie, Mark, Payne, Doug, Ridley, Kevin, Strens, Malcolm, De Villiers, Geoff, Wilson, Rebecca

Year:

2007

Language:

english

File:

PDF, 987 KB

english, 2007

14

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 21 August 2011)] Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems - Establishing a MOEMS process to realise microshutters for coded aperture imaging applications

McNie, Mark E., Dolne, Jean J., Karr, Thomas J., Davies, Rhodri R., Johnson, Ashley, Gamiz, Victor L., Rogers, Stanley, Price, Nicola, Bennett, Charlotte R., Casasent, David P., Slinger, Christopher W

Year:

2011

Language:

english

File:

PDF, 2.23 MB

english, 2011

15

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Polysilicon for everything?

Ward, M. C. L., McNie, Mark E., Bunyan, Robert J., King, David O., Carline, Roger T., Wilson, Rebecca, Gillham, J. P., French, Patrick J., Chau, Kevin H.

Year:

1998

Language:

english

File:

PDF, 3.28 MB

english, 1998

16

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachining and Microfabrication Process Technology IV - CMOS compatibiltity of high-aspect-ratio micromachining (HARM) in bonded silicon-on-insulator (BSOI)

McNie, Mark E., King, David O., Smith, James H.

Year:

1998

Language:

english

File:

PDF, 1.41 MB

english, 1998

17

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Performance enhancement and evaluation of deep dry etching on a production cluster platform

McNie, Mark E., Pickering, Christopher, Rickard, Alexandra L., Young, Iain M., Hopkins, Janet, Ashraf, Huma, McAuley, Serrita A., Nicholls, Glenn, Barnett, Richard, Roozeboom, Fred, Kemmeren, Anton, V

Year:

2003

Language:

english

File:

PDF, 730 KB

english, 2003

18

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 1 August 2010)] Adaptive Coded Aperture Imaging, Non-Imaging, and Unconventional Imaging Sensor Systems II - A 2x2 multi-chip reconfigurable MOEMS mask: a stepping stone to large format microshutter arrays for coded aperture applications

McNie, Mark E., Rogers, Stanley, Casasent, David P., Brown, Alan G., King, David O., Dolne, Jean J., Karr, Thomas J., Smith, Gilbert W., Gordon, Neil T., Gamiz, Victor L., Riches, Stephen, Rogers, Sta

Year:

2010

Language:

english

File:

PDF, 4.93 MB

english, 2010

19

SPIE Proceedings [SPIE European Symposium on Optics and Photonics for Defence and Security - London, United Kingdom (Monday 25 October 2004)] Advanced Free-Space Optical Communications Techniques and Technologies - Micromachined modulator arrays for use in free-space optical communication systems

Lewis, Keith L., Ross, Monte, Scott, Andrew M., Ridley, Kevin D., McNie, Mark E., Smith, Gilbert W., Scott, Andrew M.

Year:

2004

Language:

english

File:

PDF, 136 KB

english, 2004

20

SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] MEMS, MOEMS, and Micromachining - Designing manufacturable MEMS in CMOS-compatible processes: methodology and case studies

Schropfer, Gerold, Urey, Hakan, El-Fatatry, Ayman, McNie, Mark, da Silva, Mark, Davies, Rhodri, Rickard, Alexandra, Musalem, Francois-Xavier

Year:

2004

Language:

english

File:

PDF, 637 KB

english, 2004

21

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 1 August 2010)] Adaptive Coded Aperture Imaging, Non-Imaging, and Unconventional Imaging Sensor Systems II - An experimental infrared sensor using adaptive coded apertures for enhanced resolution

Gordon, Neil T., Rogers, Stanley, Casasent, David P., de Villiers, Geoffrey D., Ridley, Kevin D., Dolne, Jean J., Karr, Thomas J., Bennett, Charlotte R., McNie, Mark E., Gamiz, Victor L., Proudler, Ia

Year:

2010

Language:

english

File:

PDF, 453 KB

english, 2010

22

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, CA (Sunday 2 August 2009)] Adaptive Coded Aperture Imaging, Non-Imaging, and Unconventional Imaging Sensor Systems - A scalable multi-chip architecture to realise large-format microshutter arrays for coded aperture applications

McNie, Mark E., Rogers, Stanley, Casasent, David P., King, David O., Smith, Gilbert W., Dolne, Jean J., Karr, Thomas J., Stone, Steven M., Brown, Alan G., Gamiz, Victor L., Gordon, Neil T., Slinger, C

Year:

2009

Language:

english

File:

PDF, 2.13 MB

english, 2009

23

SPIE Proceedings [SPIE European Symposium on Optics and Photonics for Defence and Security - London, United Kingdom (Monday 25 October 2004)] Electro-Optical and Infrared Systems: Technology and Applications - Multimode interference (MMI) devices in silicon hollow waveguide technology for military electro-optic systems

Jenkins, Richard M., Driggers, Ronald G., Huckridge, David A., McNie, Mark E., Gorton, Eric K., Blockley, Andrew F., Maclean, Jessica O.

Year:

2004

Language:

english

File:

PDF, 1001 KB

english, 2004

24

SPIE Proceedings [SPIE Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes-Mandelieu, France (Wednesday 25 April 2001)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Development of a workstation for optical testing and modification of IMEMS on a wafer

Hedley, John, Harris, Alun J., Burdess, James S., McNie, Mark E., Courtois, Bernard, Karam, Jean Michel, Levitan, Steven P., Markus, Karen W., Tay, Andrew A. O., Walker, James A.

Year:

2001

Language:

english

File:

PDF, 1.02 MB

english, 2001

25

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Micromachining and Microfabrication Process Technology VII - Engineering in- and out-of-plane stress in PECVD silicon nitride for CMOS-compatible surface micromachining

Davies, Rhodri R., McNie, Mark E., Brunson, Kevin M., Combes, David, Karam, Jean Michel, Yasaitis, John A.

Year:

2001

File:

PDF, 438 KB

2001

26

[ASME ASME 2008 International Mechanical Engineering Congress and Exposition - Boston, Massachusetts, USA (October 31–November 6, 2008)] Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B - Multi-Degree-of-Freedom Simulation of Micro-Machined Sensors Under Mixed-Signal Control

Breit, Stephen R., Welham, Christopher J., Rouvillois, Stephane, Kraft, Michael, King, David, Combes, David, McNie, Mark

Year:

2008

Language:

english

File:

PDF, 510 KB

english, 2008